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- home > Supply > XIVITECH flotation platform Vimicro Technology SST series dual-drive precision XY positioning stage flotation
XIVITECH flotation platform Vimicro Technology SST series dual-drive precision XY positioning stage flotation
Information Name: | XIVITECH flotation platform Vimicro Technology SST series dual-drive precision XY positioning stage flotation |
Published: | 2015-07-07 |
Validity: | 360 |
Specifications: | 400 * 400 |
Quantity: | 50.00 |
Price Description: | |
Detailed Product Description: | Ⅰ: Standard Products ScanStep-T400 SST Series sports platform is the star Micro Technology continued in advanced materials, unique processing technology, precision structural analysis and design results continue to invest, we have developed goal is today demanding semiconductor industry equipment to provide high precision and high yield of motion system we have at the same time is to meet the challenges of the future to stay ahead of the technological capabilities to meet the SST flotation platform with electronics and semiconductor processing and testing equipment of challenging requirements. Conventional planar XY dual-drive platforms in the form of dual flotation flotation guide rail, precision air bearing two orders of magnitude than the rolling bearing, high precision, low friction, can work under extreme operating environment and so little, while air bearings have high load capacity, high stiffness, high speed, high precision, frictionless, pollution, etc., dual air track structure during installation and commissioning of the parallelism of the guide rail itself between precision and demanding, and the structure of the environment thermostat is also high; SST Series sports platform in order to solve these problems using an open architecture design T-type flotation, T-type structure with mechanical installation is simple, requires constant temperature of the environment is low, easy integration into Client products are. SST Series sports platform using U-shaped trough linear motor drive, this motor is simple structure, high positioning accuracy, fast response, high sensitivity, good follower, can be achieved without the contact force transmission, mechanical friction loss is almost zero, so less failure, maintenance-free, thus safe and reliable, long life, combined with high-resolution Heidenhain grating and improved fuzzy PID closed loop intelligent control technology, by adjusting the speed loop controller parameters, and adding the differential control to position the ring improve damping system, thereby improving the performance of the platform. Using speed loop pole placement and adding an appropriate feedforward compensation, so the platform to achieve high acceleration and positioning accuracy. With R & D team in materials, design, analysis expertise to the platform as a whole for continuous design optimization, application structure and magnetic preloaded air bearings of non-contact, frictionless achieve smooth motion, so motion platform micron SST system positioning accuracy and repeatability of positioning accuracy ~ nm. ABLS Series sports platform can achieve maximum acceleration 2G, maximum speed 500MM / s, the highest accuracy 0.5uM. Ⅱ: Technical ◆ ◆ planar XY motion flotation platform granite base, compact overall ◆ integrated pressure, vacuum flotation device ◆ ScanStep-T400 flotation platform for applications where high accuracy, high repeatability and high yield system. Ⅲ: key indicators ◆ stroke: 400mm & 400mm ◆ Acceleration: 1G-X axis, 2G-Y axis ◆ Speed: 500mm / s ◆ Repeatability: ± 40nm ◆ Accuracy: 0.5um (linear encoder) ◆ rate of less than 0.1% Ripple ◆ Settling time (± 100nm): <100ms ◆ natural frequency: 100Hz Ⅳ: Application research ◆ ◆ ◆ laser processing and manufacturing in semiconductor manufacturing, testing ◆ ◆ industrial manufacturing electronic parts production, assembly ◆ flat panel display manufacturing, testing |
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Copyright © GuangDong ICP No. 10089450, Micro-Star Technology Co., Ltd. Wuxi All rights reserved.
Technical support: ShenZhen AllWays Technology Development Co., Ltd.
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You are the 10989 visitor
Copyright © GuangDong ICP No. 10089450, Micro-Star Technology Co., Ltd. Wuxi All rights reserved.
Technical support: ShenZhen AllWays Technology Development Co., Ltd.
AllSources Network's Disclaimer: The legitimacy of the enterprise information does not undertake any guarantee responsibility