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| No.13705863
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Information Name: | XIVITECH flotation platform Vimicro Technology ABLS Series Linear Motor Stage |
Published: | 2015-07-07 |
Validity: | 366 |
Specifications: | 500 |
Quantity: | 100.00 |
Price Description: | |
Detailed Product Description: | ABLS Series sports platform is designed for high-precision satellite micro-technology, high-end applications platform market flotation straight. With R & D team in materials, design, analysis expertise to the platform as a whole for continuous design optimization, the use of air bearing preload structure and magnetic non-contact, frictionless achieve smooth motion, so ABLS system moving platform micron ~ positioning accuracy and repeatability of positioning accuracy of nanometers. ABLS Series sports platform main components, including chassis, rail, air slide and roof, etc., using a linear motor. Suspension works positioning platform is in the pores leads to a certain gas pressure compressed air, gas passes through the orifice of about 10μm film is formed on the opposite surface air flotation slider rails, chassis and suspension produce a certain force , slide the slider and the film-supporting roof consisting of flotation as a one-dimensional linear motion, when the levitation force and weight balance test platform, the moving platform in a stable suspension. When used as a flotation slide system load changes or there is outside interference, the system itself by changing the amount of flotation gap between the slider and the rail suspension force reaches rebalance change; the ability to have some self-regulation, film support gas floating slider and slide roof composed as a one-dimensional linear motion. Slide rails and roof composed by the flotation, as precise positioning of components, the need for precise positioning of carrying parts or tools, and scale reading head is mounted on the side of the roof, through the use of 3D modeling software of Pro / E three-dimensional model of parametric modeling method to construct the parts, by modifying the three-dimensional structure of components that space agencies rational layout, to meet assembly, manufacturing and other requirements. Modal analysis and then to the platform statics and dynamics analysis to seek the best combination of design parameters, finite element, and check its dynamic stiffness, and the effect of the parameters of structural rigidity, and finally to ultra precise air Location Platform to meet the requirements of dynamic stiffness. A reasonable proportion of the geometric parameters of the study of the various geometrical parameters influence Orifice type hydrostatic air bearings on bearing performance through simulation and experimental validation of the method, derived bearing has a high load carrying capacity, rigidity and smaller gas flow while giving the bearing design and simple method to predict whether there will be bearing the supersonic flow. Air track is a gas as lubricant support rails, high capacity, high rigidity, high speed, high precision, frictionless, pollution, etc., it is widely used in precision machinery. Air track as a flotation platform key components, its carrying capacity, stiffness, stability and rail structures, such as the diameter of the orifice, restrictor distribution is closely related to air film thickness. ABLS Series sports platform using U-shaped trough linear motor drive, this motor is simple structure, high positioning accuracy, fast response, high sensitivity, with good mobility, can be achieved without the contact force transmission, mechanical friction loss is almost zero, so less failure, maintenance-free, thus safe and reliable, long life, combined with high-resolution Heidenhain encoders and intelligent PID closed loop control technology, ABLS Series sports platform can achieve maximum acceleration 2G, maximum speed 2M / s, the highest accuracy 0.3uM. ABLS Series campaign platform for the field of microlithography, NC, biotechnology, IC packaging equipment, nano-surface topography measurements provide a loading platform enables precise positioning and precise movement, in advanced electronics manufacturing equipment such as lithography machine placement machine, high-performance motion platform is its main agencies. In addition, also as a manufacturing and testing microelectromechanical systems, optical measurement processing areas, ideal for ultra-precision machining, aerospace engine manufacturing measure precise positioning. |
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Copyright © GuangDong ICP No. 10089450, Micro-Star Technology Co., Ltd. Wuxi All rights reserved.
Technical support: ShenZhen AllWays Technology Development Co., Ltd.
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You are the 10989 visitor
Copyright © GuangDong ICP No. 10089450, Micro-Star Technology Co., Ltd. Wuxi All rights reserved.
Technical support: ShenZhen AllWays Technology Development Co., Ltd.
AllSources Network's Disclaimer: The legitimacy of the enterprise information does not undertake any guarantee responsibility